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浏覽器(qì)自(zì)帶分(fēn)享功能(néng)也(yě)很(hěn)好(hǎo)用(yò♣≤ng)哦~Application(應用(yòng))
PR stripper、Nit Stripper&≤≥€nbsp; Pre Clean 、 B-Clean Met∞♦ al Removal
Post Ash Polymer Removal
Performance(工(gōng)藝）
PA adder, <30ea @ 0.2um u% < ≤₩8% of oxide etching&n&£bsp; SECS GEM, RMS, IEMS, FDC
Scheduler
Advantage(競争優勢)
Localized Software Team
Tech Covered for 100~300mm Process Ne¥×¥eds Owned Tech of Cassette and Cas≥ασsette-less Bench
Safety(安全）
Semi S2/S6/F47 Certification
FM approval material and CO2 fire δ &✘extinguisher Interlock Matr↓δ₹$ix Control
Application(應用(yòng))
PR stripper、Nit Strip§¥per Pre Clean 、 B-Clean Metal"≈∑∑ Removal
Post Ash Polymer Removaφ☆≥l
Performance(工(gōng)藝）
PA adder, <30ea @ 0.2um&n×↕bsp; u% <8% of oxi♠σde etching SECS GEM, RMS, ×↑♣IEMS, FDC
Scheduler
Advantage(競争優勢)
Localized Software Team
Tech Covered for 100~300mm Process Needs π∑∏"Owned Tech of Cassette and Cass♦ette-less Bench
Safety(安全）
Semi S2/S6/F47 Certification
FM approval material and CO2 fire exting<∏uisher Interlock Matrix Cα£♦>ontrol
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