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Application(應用(yòng))
PR stripper、Nit Stripper Pr≤↓£≤e Clean 、 B-Clean α♣ε Metal Removal
Post Ash Polymer Removal
Performance(工(gōng)藝)
PA adder, <30ea @ 0.2'∑£um u% <8% of oxide etc←←∏±hing SECS GEM, RMS, IE£ "MS, FDC
Scheduler
Advantage(競争優勢)
Localized Software Team
Tech Covered for 100~300mm Process Needs&nbs≥ λp; Owned Tech of Cassette and Cass≈ ♠™ette-less Bench
Safety(安全)
Semi S2/S6/F47 Certification
FM approval material and CO2 fire ♦¶≈extinguisher Interlock Matrix Control
Application(應用(yòng)÷♥←)
PR stripper、Nit Stripper P♦♣βδre Clean 、 B-Clean Metal R✔emoval
Post Ash Polymer Removal
Performance(工(gōng)藝)
PA adder, <30ea @ 0.2um u≠★% <8% of oxide etching SECS GEM, RMS,✔☆Ω IEMS, FDC
Scheduler
Advantage(競争優勢)
Localized Software Team
Tech Covered for 100~300mm Process Needs ₽↓; Owned Tech of Cassette and Cassette-less Bench
Safety(安全)
Semi S2/S6/F47 Certificat<→ion
FM approval material and¥∑≈ CO2 fire extinguisher InterlockΩ®α Matrix Control
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