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Application(應用(yòng))
PR stripper、Nit Stripper Pr←π✔≤e Clean 、 B-Clean Metal Removal
Post Ash Polymer Removal
Performance(工(gōng)藝)
PA adder, <30ea @ 0.2um u% <↔↑8% of oxide etching ≈β←ε; SECS GEM, RMS, IEMS, FD≤ ε←C
Scheduler
Advantage(競争優勢)
Localized Software Team
Tech Covered for 100~3§♣00mm Process Needs Owned Tech o¥>✔ f Cassette and Cassette-less Bench
Safety(安全)
Semi S2/S6/F47 Certification
FM approval material and CO2 fire ₩ extinguisher Interlock Matrλ•αix Control
Application(應用(yòng))
PR stripper、Nit Stripper Pre Clean 、 B ↕₹♦-Clean Metal Removal
Post Ash Polymer Removal
Performance(工(gōng)藝™↔₽<)
PA adder, <30ea @ 0.2um u% <8•✔→"% of oxide etching SECS GEM, RMS, IEMS, ♥>FDC
Scheduler
Advantage(競争優勢)
Localized Software Team
Tech Covered for 100~☆∏✘300mm Process Needs & Owned Tech of Cassette and Cassette-less Benc" ₩∞h
Safety(安全)
Semi S2/S6/F47 Certifica≥₹ tion
FM approval material a♥☆α®nd CO2 fire extinguisher Interlock Matrix λ☆Control
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