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Application(應用(yòng))
PR stripper、Nit Stripper P¶♣≈φre Clean 、 B-Clean Metal δⱩRemoval
Post Ash Polymer Removal
Performance(工(gōng)藝)
PA adder, <30ea @ ♠¶ 0.2um u% <8% of oxide etchi→∑αng SECS GEM, RMS, IEMS, FDC
Scheduler
Advantage(競争優勢)
Localized Software Team
Tech Covered for 100~3↕ ®γ00mm Process Needs Owned Tech of Cassettδ≥e and Cassette-less Bench
Safety(安全)
Semi S2/S6/F47 Certification
FM approval material¥←≤ and CO2 fire extinguisher Interlock Matr↓×ε×ix Control
Application(應用(yòng))
PR stripper、Nit Stripper Ω∏₽≠ Pre Clean 、 B-Clean Metal Remoπφ$val
Post Ash Polymer Removal
Performance(工(gōng)藝)
PA adder, <30ea @ 0.2um&π→nbsp; u% <8% of oxide etching §♠₹ SECS GEM, RMS, IEMS, FDC
Scheduler
Advantage(競争優勢)
Localized Software Team
Tech Covered for 100~300mm Process Needs ₹'↕Owned Tech of Cassette and Cassette≥✘£-less Bench
Safety(安全)
Semi S2/S6/F47 Certification
FM approval material and CO2 fire extinguisher• Interlock Matrix C£λ£ontrol
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